Greene Tweed CHEMRAZ® 520 Perfluoroelastomer

Chemraz® 520 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contaminations is required. Additionally, Chemraz 520 offers excellent performance history in static and dynamic plasma and diffusion processes as well as static photolithography processes. Chemraz 520 is formulated for use in high sealing load applications and where temperatures do not exceed 240°C (464°F). Due to the hardness of this material, low-temperature applications may require smoother hardware surface finishes of 10 micro inches (Ra) and below.Applications:Door sealsSlit valvesIsolator valve seatsLid SealsGas inlet sealsKF fitting sealsInformation provided by Greene Tweed.