DuPont Performance Polymers Kalrez® 9100 Fluoroelastomer

DuPont™ Kalrez® 9100 perfluoroelastomers parts are an amber translucent product for PV cell manufacturing processes requiring resistance to fluorine-based plasma including amorphous/microcrystalline silicon thin film deposition. It exhibits very low weight loss and ultra-low particle generation in fluorine-based plasma, e.g., NF3, F2, etc. It also offers excellent resistance to dry process chemistry and has excellent thermal stability, compression set and outgassing properties. Kalrez® 9100 has good mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300 °C is suggested. Features/Benefits Very low weight loss and ultra-low particle generation in fluorine-based plasma Excellent resistance to dry process chemistry Excellent thermal stability Excellent (low) compression set and outgassing properties Suggested Applications Gas valve/slit valve door seals Gas inlet/orifice seals Isolation valve seals Substrate handling pads Chamber lid seals