Chemical Properties | Metric | English | Comments |
---|---|---|---|
Ionic Impurities - K (Potassium) | 1.1 ppm | 1.1 ppm | ICP/MS |
Quadrant EPP Semitron® CMP LL5 Polyester (ASTM Product Data Sheet) Enhanced semi-crystalline polyester product for extended service in CMP retaining rings. Superior performance, especially in oxide processes, and cost effective relative to standard ring materials. .. |