Thermal Properties | Metric | English | Comments |
---|---|---|---|
Melting Point | -114 °C | -173 °F | |
Solvay Chemicals COF2 Carbonyl difluoride Carbonyl difluoride has GWP=1 and can replace PFCs in chamber cleaning and in etching processes Carbonyl difluoride: CAS-No.: 353-50-4 / EC-No.: 206-534-2Uses: Etching agent, Electronic industry, Su.. |