Physical Properties | Metric | English | Comments |
---|---|---|---|
Thickness | 0.0700 - 0.100 microns | 0.00276 - 0.00394 mil | |
Dow SiLK™ Y 80 Semiconductor Dielectric Resin SiLK™ Y 80 has an average pore size of < 2nm and a range of 1-3 nm, porous SiLK™ resins enables continuous Tantulum PVD barriers for 65 nm technology and beyond. Information provided by Dow |