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DuPont Performance Polymers Kalrez® 9500 Fluoroelastomer

Category Polymer , Thermoset , Fluoropolymer, TS , Thermoset Fluoroelastomer , Rubber or Thermoset Elastomer (TSE)
Manufacturer DuPont Performance Polymers (Former DuPont Elastomers)
Trade Name Kalrez®
Port Ningbo port,China
Trade Terms FOB, CFR, CIF
Payment Terms L/C, T/T, Western Union
Download PDF DuPont Performance Polymers Kalrez® 9500 Fluoroelastomer.pdf
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Material Notes:
DuPont™ Kalrez® 9500 perfluoroelastomer parts are a tan product for Deposition, Ash/Strip and Conductor (Poly/Metal) Etch processes. It has been specifically designed for use in applications where ozone is used for processing, e.g. SACVD, PECVD ultra-low K (BLOK™), and where the plasma environment is more “chemical”, i.e., where oxygen and fluorine radicals are more dominant. Kalrez® 9500 exhibits excellent resistance to CVD and ash/strip process chemistry, i.e., ozone, ammonia and water vapor. It also offers outstanding thermal stability, very low outgassing and excellent mechanical strength and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 310 °C is suggested. Kalrez® 9500 can also withstand short-term excursions up to 325 °C. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9500 parts. Features/Benefits Excellent resistance to CVD and ash/strip process chemistry (ozone, ammonia, water vapor, etc.) Low erosion rate and ultra-low particle generation in radical dominant oxygen and fluorine-based plasmas Excellent thermal stability Very low outgassing and metals content Excellent mechanical strength Suggested Applications Gas inlet/orifice/mixing block seals Chamber lid seals Isolation valve seals Bonded gate valves/slit valve door seals
Mechanical Properties Metric English Comments
Hardness, Shore A 75
75
Plied slab; ASTM D2240
Hardness, Shore M 79
79
O-ring; ASTM D1414, ASTM D2240
Tensile Strength at Break 17.5 MPa
2540 psi
ASTM D412
Elongation at Break 205 %
205 %
ASTM D412
100% Modulus 0.00950 GPa
1.38 ksi
ASTM D1414, ASTM D412
Compression Set 20 %

@Temperature 204 °C,
Time 252000 sec
20 %

@Temperature 399 °F,
Time 70.0 hour
ASTM D1414 and ASTM D395B
36 %

@Temperature 250 °C,
Time 252000 sec
36 %

@Temperature 482 °F,
Time 70.0 hour
ASTM D1414 and ASTM D395B
59 %

@Temperature 310 °C,
Time 252000 sec
59 %

@Temperature 590 °F,
Time 70.0 hour
ASTM D1414 and ASTM D395B
Thermal Properties Metric English Comments
Maximum Service Temperature, Air 310 °C
590 °F
DuPont Test Method
Descriptive Properties Value Comments
Color Tan
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